技术参数:
分辨率：  1.0nm @ 15 KV
                 1.7 nm @ 1 KV
                 3.5nm @0.2KV
                 4.0nm@0.1KV
                 2.0nm @30KV(VP mode)
放大倍数：12 - 900,000x
加速电压：0.1 - 30 KV
低压范围：2-133Pa  1Pa步进可调
探针电流：4 pA - 10 nA (4 pA - 20 nA 可选)
样品室：  330 mm (Ø) x 270 mm (h)
样品台：  5轴驱动
                 X = 130mm
                 Y = 130 mm
                 Z = 50mm
                倾斜角T = -3 to 70°
                 R = 360°连续旋转